Sic Silicon Carbide Ceramic Tray Plates For Icp Etching

Product detail

The wafer carriers utilized in epitaxial growth processes are subjected to high temperatures and rigorous chemical cleaning. Mascera offers high-purity silicon carbide ceramic tray plates that provide exceptional heat resistance, uniform thermal distribution for consistent epi layer thickness and resistance, and robust chemical resistance.

Non-oxide ceramic, silicon carbide ceramic (SiC) is an superhard material which has moh's hardness up to 9.5. Silicon carbide ceramic not only has excellent mechanical properties at room temperature, such as high bending strength, excellent oxidation resistance, good corrosion resistance, high wear resistance and low friction coefficient, but also outstanding mechanical properties (strength, creep resistance) at high temperature, the high temperature strength can be maintained up to 1600°C, which is the best among all ceramic materials. The oxidation resistance of silicon carbide ceramic is also the best among all non-oxide ceramics.

Mascera produced silicon carbide ceramics in two forms, sintered silicon carbide (SSiC) and reaction bonded silicon carbide (SiSiC). 

Sintered silicon carbide ceramic is produced by utilizing high-purity and nano-grade raw powders, which are sintered at a high temperature ranging from 2100℃ to 2200℃. This sintering process leads to densification of the green body and approximately 20% shrinkage. On the other hand, reaction-bonded silicon carbide utilizes micron-sized silicon carbide powder and is sintered at a temperature range of 1450℃ to 1700℃. Unlike sintered silicon carbide, reaction-bonded silicon carbide does not undergo shape shrinkage during the sintering process.

The higher sintering temperature of sintered silicon carbide results in improved performance characteristics, including higher density, increased strength, and enhanced resistance to oxidation and corrosion. For applications that do not require such high-performance properties, reaction-bonded silicon carbide is a more cost-effective choice

Main properties of silicon carbide ceramic

• High strength in high temperature

• High-temperature oxidation resistance

• Excellent wear resistance

• Low thermal expansion coefficient

• High thermal conductivity

• Excellent thermal shock resistance

• High hardness

• Light weight because of low density
  

• Good corrosion resistance

Typical applications of silicon carbide ceramics

• Mechanial seal rings

• Balls, seats, liners for valve

• Kiln furniture

• Heat exchangers

• Fixed and moving turbine components

• Grinding media

• Military bulletproof plates

• Components for burners

• Ceramic bearings

Material Data Sheet

Available shapes of silicon carbide ceramics

1. Ceramic rod / ceramic pin / ceramic plunger

2. Ceramic tube / ceramic bushing / ceramic sleeve

3. Ceramic ring / ceramic washer / ceramic spacer 

4. Ceramic disc

5. Ceramic plate / ceramic block

6. Ceramic ball

7. Ceramic piston

8. Ceramic nozzle

9. Ceramic crucible
   

10. Other custom ceramic parts

Packing & Shipment