Alumina Ceramic End Effectors for Semiconductor Wafer Handling

Product Detail

Wafer handling end effectors are installed on wafer handling robots and are responsible for transporting silicon wafers to designated positions. The surface of the end effector comes into direct contact with the wafers. Therefore, the end effector must have precise dimensions and thermal stability, as well as a smooth, abrasion-resistant surface to ensure that no particulate contamination occurs during wafer handling.

Due to the properties of alumina ceramics, such as high-temperature resistance, wear resistance, corrosion resistance, and low friction coefficient, with a maximum operating temperature of up to 1750°C, they exhibit excellent thermal stability and superior mechanical, electrical, and thermal properties. These characteristics make them highly suitable for high-quality components and ensure that the performance requirements of wafer handling end effectors are met.

Mascera's ceramic end effectors are made from high-purity alumina powder through isostatic pressing, high-temperature sintering, and precision machining, offering excellent surface finish and dimensional accuracy to meet the customization needs of users.

Product Features

• High hardness and wear resistance

• Excellent corrosion resistance

• Good insulation properties even at high temperatures

• Excellent heat resistance

• Superior mechanical strength

Material Data Sheet

Packing & Shipment