Boron nitride Components for Semiconductor Equipment
- MSJ/BN-013
- boron nitride ceramic
- customized
- 5 pcs per type
- Semiconductor Equipment
The hot-pressed boron nitride produced by Mascera is an advanced ceramic material formed by high-temperature pressing and sintering of hexagonal boron nitride powder. It is highly suitable for the production of various shielding and insulation components used in harsh high-temperature environments, such as physical vapor deposition (PVD), chemical vapor deposition (CVD), and plasma.
Any inquiry please email info@mascera-tec.com or call +86 13860446139
Product detail
The hot-pressed boron nitride produced by Mascera is an advanced ceramic material formed by high-temperature pressing and sintering of hexagonal boron nitride powder. It is a dense and easily machinable material that exhibits properties such as high temperature resistance, low thermal expansion coefficient, low friction coefficient, excellent dielectric strength and insulation. These characteristics make it highly suitable for various shielding and insulation components in harsh high-temperature environments, such as physical vapor deposition (PVD), chemical vapor deposition (CVD), and plasma. These components, including insulation shrouds and rails, target frames, protective tubes, shields, and liners, ensure that the PVD arc remains confined to the target area, preventing equipment damage.
Main properties
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Material Data Sheet
| Material Type | BN-997 | BN-99 | BN-A | BN-B | BN-C | BN-D | BN-E |
|---|---|---|---|---|---|---|---|
Main Content | BN>99.7% | BN>99% | BN+AL+SI | BN+ZR+AL | BN+SIC | BN+ZRO2 | BN+AlN |
Color | White | White | Light Grey | Light Grey | Grey Green | Dark Grey | Grey Green |
Density (g/cm3) | 1.6 | 1.95-2.0 | 2.2-2.3 | 2.25-2.35 | 2.4-2.5 | 2.8-2.9 | 2.8-2.9 |
Flexural Strength (Mpa) | 18 | 30 | 65 | 65 | 80 | 90 | 90 |
Compressive Strength (Mpa) | 45 | 85 | 145 | 145 | 175 | 220 | 220 |
Electrical Resistivity (Ω.Cm) | >1014 | >1014 | >1013 | >1013 | >1012 | >1012 | >1013 |
Max. Service Temp. (℃) @Air Condition | 900 | 900 | 900 | 900 | 900 | 900 | 900 |
Max. Service Temp. (℃) @Vacuum Condition | 1800 | 1800 | 1750 | 1750 | 1800 | 1800 | 1750 |
Max. Service Temp. (℃) @Inert Gas Condition | 2100 | 2100 | 1750 | 1750 | 1800 | 1800 | 1750 |
Thermal Conductivity (W/Mk) | 35 | 40 | 35 | 35 | 45 | 30 | 85 |
Thermal Expansion Coefficient (25 - 1000℃) (10-6/K) | 1.5 | 1.8 | 2.0 | 2.0 | 2.8 | 3.5 | 2.8 |
Tips for Using
1.Working temperature in the air should not exceed 900℃, oxidation will occur when more than 900°C.
2.The components shall be stored in the dry environment inside a sealed container.
3.Never wash the component with water. Use fine sandpaper or cloth to remove any dirts or residues.
Packing & Shipment
| Package type | carton box with foam protection |
| Payment terms | TT / Western Union / Paypal 50% payment in advanced and 50% before shipment |
| Loading port | Xiamen, China |
| Shipping way | By sea / air / door-to-door express |
